Using internet-enabled remote instrumentation for research and training in physics: evaluation of different diffusion barriers for silver metallization

dc.contributor.advisorAdams, D.
dc.contributor.authorMajiet, Siradz
dc.date.accessioned2014-09-11T13:53:31Z
dc.date.accessioned2024-11-04T13:14:47Z
dc.date.available2014-09-11T13:53:31Z
dc.date.available2024-11-04T13:14:47Z
dc.date.issued2007
dc.description>Magister Scientiae - MScen_US
dc.description.abstractThe growth of the Internet has led to many interesting developments for both educational and commercial purposes. In this project an attempt was made to use the Internet for a research purpose to facilitate the determination of the thermal stability of diffusion barriers. Another purpose of this thesis is to investigate the teaching and training use of the Internet through the development of online interactive tools and activities as well as materials. The training aspects are mentioned as it is hoped that this thesis can serve as a form of documentation of the use of the Internet, while the central part was the determination of thermal stability of TiN, TaN and TiW diffusion barriers on Ag.en_US
dc.identifier.urihttps://hdl.handle.net/10566/17176
dc.language.isoenen_US
dc.rights.holderuwcen_US
dc.subjectInterneten_US
dc.subjectCollaboratoryen_US
dc.subjectVirtual laboratoryen_US
dc.subjectRemote instrumentationen_US
dc.subjectThermal stabilityen_US
dc.subjectDiffusion barriersen_US
dc.subjectRutherford backscatteringen_US
dc.subjectScanning electron microscopeen_US
dc.subjectFour point probe furnaceen_US
dc.subjectX-ray diffractionen_US
dc.titleUsing internet-enabled remote instrumentation for research and training in physics: evaluation of different diffusion barriers for silver metallizationen_US

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