Effects of Film Thickness of ALD-Deposited Al2O3, ZrO2 and HfO2 Nano-Layers on the Corrosion Resistance of Ti(N,O)-Coated Stainless Steel
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Date
2023
Journal Title
Journal ISSN
Volume Title
Publisher
MDPI
Abstract
The goal of this stydy was to explore the potential of the enhanced corrosion resistance of
Ti(N,O) cathodic arc evaporation-coated 304L stainless steel using oxide nano-layers deposited by
atomic layer deposition (ALD). In this study, we deposited Al2O3, ZrO2, and HfO2 nanolayers of
two different thicknesses by ALD onto Ti(N,O)-coated 304L stainless steel surfaces. XRD, EDS, SEM,
surface profilometry, and voltammetry investigations of the anticorrosion properties of the coated
samples are reported. The amorphous oxide nanolayers homogeneously deposited on the sample
surfaces exhibited lower roughness after corrosion attack compared to the Ti(N,O)-coated stainless
steel. The best corrosion resistance was obtained for the thickest oxide layers. All samples coated
with thicker oxide nanolayers augmented the corrosion resistance of the Ti(N,O)-coated stainless
steel in a saline, acidic, and oxidising environment (0.9% NaCl + 6% H2O2, pH = 4), which is of
interest for building corrosion-resistant housings for advanced oxidation systems such as cavitation
and plasma-related electrochemical dielectric barrier discharge for breaking down persistent organic
pollutants in water.
Description
Keywords
Atomic layer deposition, Oxides, Oxynitrate, corrosion resistance, Electrochemical dielectric
Citation
Dinu, M., t al (2023). Effects of film thickness of ALD-deposited Al2O3, ZrO2 and HfO2 nano-layers on the corrosion resistance of ti(N,O)-coated stainless steel. Materials, 16(5) doi:10.3390/ma16052007