Browsing by Author "Towfie, Nazley"
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Item Dynamic variation of hydrogen dilution during hot-wire chemical vapour deposition of silicon thin films(University of the Western Cape, 2013) Towfie, Nazley; Arendse, Christopher J.; Muller, T.F.G.; Malgas, G.This study reports on the effects of hydrogen dilution and deposition time on six silicon thin films deposited at six specific deposition regimes. The thin film properties are investigated via X-Ray diffraction analysis, raman spectroscopy, fourier transform infra-red spectroscopy, elastic recoil detection analysis, scanning and transmission electron microscopy and UV-visible spectroscopy. This investigation revealed the dominating etching effect of atomic hydrogen with the increase in hydrogen dilution and a bonded hydrogen content (CH) exceeding 10 at.% for each of the six thin films. The optically determined void volume fraction and static refractive index remain constant, for each thin film, with the change in CH